In addition, a thin-film ZnO gas sensor was fabricated by using near-field electrospray, as shown in Fig. 9.8. Comb electrodes with a large contact area were printed to increase the sensitivity of micro/nanosensors. The electrospray micro/nanoparticles were deposited over the electrodes, which would be heated and oxidized to form a ZnO semiconductor at 500℃ afterward. The experimental results showed that the fabricated sensor displays high sensitivity because of the small diameter and high specific surface area of the electrospray particles, indicating a new promising method for the integration fabrication of micro/nanodevices.
